Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures

Tamotsu Nishino, Masatake Hangai, Yukihisa Yoshida, Sang-Seok Lee. Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures. IEICE Transactions, 93-C(7):1111-1118, 2010. [doi]

@article{NishinoHYL10,
  title = {Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures},
  author = {Tamotsu Nishino and Masatake Hangai and Yukihisa Yoshida and Sang-Seok Lee},
  year = {2010},
  url = {http://search.ieice.org/bin/summary.php?id=e93-c_7_1111},
  researchr = {https://researchr.org/publication/NishinoHYL10},
  cites = {0},
  citedby = {0},
  journal = {IEICE Transactions},
  volume = {93-C},
  number = {7},
  pages = {1111-1118},
}