Kyotaro Nitta, Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu. Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.