Feng Niu, Ken Cornett, Wayne Chiou, Tim Bancroft, Bob O'Dea. MEMS structures for pervasive device applications. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: "e-Systems and e-Man for Cybernetics in Cyberspace", Tucson, Arizona, USA, 7-10 October 2001. pages 1636-1641, IEEE, 2001. [doi]
Abstract is missing.