MEMS structures for pervasive device applications

Feng Niu, Ken Cornett, Wayne Chiou, Tim Bancroft, Bob O'Dea. MEMS structures for pervasive device applications. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: "e-Systems and e-Man for Cybernetics in Cyberspace", Tucson, Arizona, USA, 7-10 October 2001. pages 1636-1641, IEEE, 2001. [doi]

Abstract

Abstract is missing.