An optimization framework for waferfab performance enhancement

Daniel Noack, Boon-Ping Gan, Peter Lendermann, Oliver Rose. An optimization framework for waferfab performance enhancement. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2194-2200, WSC, 2008. [doi]

Abstract

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