Roumen Nojdelov, Dirk Voigt, Arthur S. van de Nes, Stoyan N. Nihtianov. Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement. In 9th International Conference on Sensing Technology, ICST 2015, Auckland, New Zealand, December 8-10, 2015. pages 575-580, IEEE, 2015. [doi]
@inproceedings{NojdelovVNN15,
title = {Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement},
author = {Roumen Nojdelov and Dirk Voigt and Arthur S. van de Nes and Stoyan N. Nihtianov},
year = {2015},
doi = {10.1109/ICSensT.2015.7438464},
url = {https://doi.org/10.1109/ICSensT.2015.7438464},
researchr = {https://researchr.org/publication/NojdelovVNN15},
cites = {0},
citedby = {0},
pages = {575-580},
booktitle = {9th International Conference on Sensing Technology, ICST 2015, Auckland, New Zealand, December 8-10, 2015},
publisher = {IEEE},
isbn = {978-1-4799-6314-0},
}