Roumen Nojdelov, Dirk Voigt, Arthur S. van de Nes, Stoyan N. Nihtianov. Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement. In 9th International Conference on Sensing Technology, ICST 2015, Auckland, New Zealand, December 8-10, 2015. pages 575-580, IEEE, 2015. [doi]
Abstract is missing.