Application of metaheuristic algorithms in nano-process parameter optimization

M. S. Norlina, P. Mazidah, N. D. Md Sin, M. Rusop. Application of metaheuristic algorithms in nano-process parameter optimization. In IEEE Congress on Evolutionary Computation, CEC 2015, Sendai, Japan, May 25-28, 2015. pages 2625-2630, IEEE, 2015. [doi]

Abstract

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