Richard O'Donnell. Prolog to using advanced simulation to aid microlithography development. Proceedings of the IEEE, 89(8):1192-1193, 2001. [doi]
@article{ODonnell01-0,
title = {Prolog to using advanced simulation to aid microlithography development},
author = {Richard O'Donnell},
year = {2001},
doi = {10.1109/JPROC.2001.940287},
url = {https://doi.org/10.1109/JPROC.2001.940287},
researchr = {https://researchr.org/publication/ODonnell01-0},
cites = {0},
citedby = {0},
journal = {Proceedings of the IEEE},
volume = {89},
number = {8},
pages = {1192-1193},
}