Role of the substrate and the temperature of deposition on the properties of the TaxN thin films

Miroslav Ocko, Sanja Zonja, Mile Ivanda. Role of the substrate and the temperature of deposition on the properties of the TaxN thin films. In 2012 Proceedings of the 35th International Convention, MIPRO 2012, Opatija, Croatia, May 21-25, 2012. pages 17-18, IEEE, 2012. [doi]

Abstract

Abstract is missing.