A 3.06 μm Single-Photon Avalanche Diode Pixel with Embedded Metal Contact and Power Grid on Deep Trench Pixel Isolation for High-Resolution Photon Counting

Jun Ogi, Fumiaki Sano, Tatsuya Nakata, Yoshiki Kubo, Wataru Onishi, Charith Koswaththage, Takeya Mochizuki, Yoshiaki Tashiro, Kazuki Hizu, Takafumi Takatsuka, Iori Watanabe, Fumihiko Koga, Tomoyuki Hirano, Yusuke Oike. A 3.06 μm Single-Photon Avalanche Diode Pixel with Embedded Metal Contact and Power Grid on Deep Trench Pixel Isolation for High-Resolution Photon Counting. Sensors, 23(21):8906, November 2023. [doi]

Abstract

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