A switching gain scheduled approach for wafer transfer robots and its experimental evaluations

Shinsuke Oh-hara, Kenji Hirata, Yoshito Ohta. A switching gain scheduled approach for wafer transfer robots and its experimental evaluations. In American Control Conference, ACC 2006, Minneapolis, MN, USA, 14-16 June, 2006. pages 1-6, IEEE, 2006. [doi]

Abstract

Abstract is missing.