Jae Sub Oh, Kwang Il Choi, Young-Su Kim, Min Ho Kang, Myeong Ho Song, Sung Kyu Lim, Dong Eun Yoo, Jeong Gyu Park, Hi-Deok Lee, Ga-won Lee. SONOS-Type Flash Memory with HfO::2:: Thinner than 4 nm as Trapping Layer Using Atomic Layer Deposition. IEICE Transactions, 93-C(5):590-595, 2010. [doi]
@article{OhCKKSLYPLL10,
title = {SONOS-Type Flash Memory with HfO::2:: Thinner than 4 nm as Trapping Layer Using Atomic Layer Deposition},
author = {Jae Sub Oh and Kwang Il Choi and Young-Su Kim and Min Ho Kang and Myeong Ho Song and Sung Kyu Lim and Dong Eun Yoo and Jeong Gyu Park and Hi-Deok Lee and Ga-won Lee},
year = {2010},
url = {http://search.ieice.org/bin/summary.php?id=e93-c_5_590},
researchr = {https://researchr.org/publication/OhCKKSLYPLL10},
cites = {0},
citedby = {0},
journal = {IEICE Transactions},
volume = {93-C},
number = {5},
pages = {590-595},
}