Jae Sub Oh, Kwang Il Choi, Young-Su Kim, Min Ho Kang, Myeong Ho Song, Sung Kyu Lim, Dong Eun Yoo, Jeong Gyu Park, Hi-Deok Lee, Ga-won Lee. SONOS-Type Flash Memory with HfO::2:: Thinner than 4 nm as Trapping Layer Using Atomic Layer Deposition. IEICE Transactions, 93-C(5):590-595, 2010. [doi]
Abstract is missing.