SeongJin Oh, Tae-Yong Kim, Jongpil Jeong, Chae-gyu Lee, Yongju Na, Se-Hyeon Ryu. A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control. In 8th IEEE/ACIS International Conference on Big Data, Cloud Computing, and Data Science, BCD 2023, Hochimin City, Vietnam, December 14-16, 2023. pages 108-113, IEEE, 2023. [doi]
Abstract is missing.