External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Deep-amorphization and solid-phase epitaxial regrowth processes for hybrid orientation technologies in SOI MOSFETs with thin body

A. Ohata, Y. Bae, Sorin Cristoloveanu, Thomas Signamarcheix, J. Widiez, B. Ghyselen, Olivier Faynot, Laurent Clavelier. Deep-amorphization and solid-phase epitaxial regrowth processes for hybrid orientation technologies in SOI MOSFETs with thin body. Microelectronics Reliability, 52(11):2602-2608, 2012. [doi]

Abstract

Abstract is missing.

runs on