Nanoprecision Micromechanical Fabrication

Hitoshi Ohmori, Weimin Lin, Yoshihiro Uehara, Yutaka Watanabe, Shinya Morita, Toru Suzuki, Kazutoshi Katahira. Nanoprecision Micromechanical Fabrication. IJAT, 2(1):24-33, 2008. [doi]

Abstract

Abstract is missing.