Kouhei Ohtani, Naho Osato, Masaki Hashizume, Hiroyuki Yotsuyanagi, Shyue-Kung Lu. A defect level monitor of resistive open defect at interconnects in 3D ICs by injected charge volume. In 17th International Symposium on Communications and Information Technologies, ISCIT 2017, Cairns, Australia, September 25-27, 2017. pages 1-5, IEEE, 2017. [doi]
Abstract is missing.