Kento Okamoto, Toshifumi Kikuchi, Akihiro Ikeda, Hiroshi Ikenoue, Tanemasa Asano. Formation of Low Resistance Contacts to p-type 4H-SiC using Al-Film Source Laser Doping. In Maria Raposo, Paulo A. Ribeiro, David Andrews, editors, Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2019, Prague, Czech Republic, February 25-27, 2019. pages 294-298, SciTePress, 2019. [doi]
Abstract is missing.