Defect cluster recognition system for fabricated semiconductor wafers

Melanie Po-Leen Ooi, Hong Kuan Sok, Ye Chow Kuang, Serge N. Demidenko, Chris Chan. Defect cluster recognition system for fabricated semiconductor wafers. Eng. Appl. of AI, 26(3):1029-1043, 2013. [doi]

Abstract

Abstract is missing.