Tom Oomen, Robbert van Herpen, Sander Quist, Marc van de Wal, Okko H. Bosgra, Maarten Steinbuch. Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage. IEEE Trans. Contr. Sys. Techn., 22(1):102-118, 2014. [doi]
Abstract is missing.