Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage - researchr publication authors

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Tom Oomen, Sander Quist, Robbert van Herpen, Okko H. Bosgra. Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. In Proceedings of the 49th IEEE Conference on Decision and Control, CDC 2010, December 15-17, 2010, Atlanta, Georgia, USA. pages 5530-5535, IEEE, 2010. [doi]

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