Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

Tom Oomen, Sander Quist, Robbert van Herpen, Okko H. Bosgra. Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. In Proceedings of the 49th IEEE Conference on Decision and Control, CDC 2010, December 15-17, 2010, Atlanta, Georgia, USA. pages 5530-5535, IEEE, 2010. [doi]

@inproceedings{OomenQHB10,
  title = {Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage},
  author = {Tom Oomen and Sander Quist and Robbert van Herpen and Okko H. Bosgra},
  year = {2010},
  doi = {10.1109/CDC.2010.5717797},
  url = {http://dx.doi.org/10.1109/CDC.2010.5717797},
  researchr = {https://researchr.org/publication/OomenQHB10},
  cites = {0},
  citedby = {0},
  pages = {5530-5535},
  booktitle = {Proceedings of the 49th IEEE Conference on Decision and Control, CDC 2010, December 15-17, 2010, Atlanta, Georgia, USA},
  publisher = {IEEE},
}