Sebastian Orellana, B. Arrazat, P. Fornara, C. Rivero, S. Blayac, Pierre Montmitonnet, Karim Inal. Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect. Microelectronics Reliability, 55(9-10):1896-1900, 2015. [doi]
Abstract is missing.