SiC and Diamond Membrane Based Pressure Sensors for Harsh Environments

Andrea Orsini, Sara Pettinato, Daniele Barettin, Armando Piccardi, Gennaro Salvatore Ponticelli, Stefano Salvatori. SiC and Diamond Membrane Based Pressure Sensors for Harsh Environments. In IEEE International Workshop on Metrology for Industry 4.0 & IoT, MetroInd4.0&IoT 2021, Rome, Italy, June 7-9, 2021. pages 161-165, IEEE, 2021. [doi]

Abstract

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