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Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

Vytautas Ostasevicius, Rimvydas Gaidys, Rolanas Dauksevicius. Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices. Sensors, 9(12):10201-10216, 2009. [doi]

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