Michael Ott, Jason Abt, Udit Sharma, Edward Keyes, Trevor J. Hall, Henry Schriemer. Quantitative Capacitance Measurements of MOS Structures using a Scanning Probe Microscope. In Proceedings of the Canadian Conference on Electrical and Computer Engineering, CCECE 2007, May 7, 10, 2006, Ottawa Congress Centre, Ottawa, Canada. pages 842-845, IEEE, 2006. [doi]
Abstract is missing.