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Concurrent Guiding Template Assignment and Redundant via Insertion for DSA-MP Hybrid Lithography

Jiaojiao Ou, Bei Yu, David Z. Pan. Concurrent Guiding Template Assignment and Redundant via Insertion for DSA-MP Hybrid Lithography. In Evangeline F. Y. Young, Mustafa Ozdal, editors, Proceedings of the 2016 on International Symposium on Physical Design, ISPD 2016, Santa Rosa, CA, USA, April 3-6, 2016. pages 39-46, ACM, 2016. [doi]

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Jiaojiao Ou

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Bei Yu

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David Z. Pan

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