Level-set strategy for inverse DSA-lithography

Gaddiel Ouaknin, Nabil Laachi, Kris T. Delaney, Glenn H. Fredrickson, Frédéric Gibou. Level-set strategy for inverse DSA-lithography. J. Comput. Physics, 375:1159-1178, 2018. [doi]

Abstract

Abstract is missing.