Faik S. Ozdemir. Electron beam lithography. In David W. Hightower, editor, Proceedings of the 16th Design Automation Conference, DAC '79, San Diego, California, USA, June 25-27, 1979. pages 383-391, ACM, 1979. [doi]
@inproceedings{Ozdemir79,
title = {Electron beam lithography},
author = {Faik S. Ozdemir},
year = {1979},
url = {http://dl.acm.org/citation.cfm?id=811744},
researchr = {https://researchr.org/publication/Ozdemir79},
cites = {0},
citedby = {0},
pages = {383-391},
booktitle = {Proceedings of the 16th Design Automation Conference, DAC '79, San Diego, California, USA, June 25-27, 1979},
editor = {David W. Hightower},
publisher = {ACM},
}