Mehmet Ozdogan, Shahrzad Towfighian. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes. Micromachines, 7(3):42, 2016. [doi]
@article{OzdoganT16,
title = {Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes},
author = {Mehmet Ozdogan and Shahrzad Towfighian},
year = {2016},
doi = {10.3390/mi7030042},
url = {http://dx.doi.org/10.3390/mi7030042},
researchr = {https://researchr.org/publication/OzdoganT16},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {7},
number = {3},
pages = {42},
}