Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

Mehmet Ozdogan, Shahrzad Towfighian. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes. Micromachines, 7(3):42, 2016. [doi]

Abstract

Abstract is missing.