Prem Pal, Kazuo Sato, Hirotaka Hida. MEMS components with perfectly protected edges and corners in Si{110} wafers. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 55-59, IEEE, 2011. [doi]
Abstract is missing.