Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing

Simone Pampuri, Andrea Schirru, Giuseppe Fazio, Giuseppe De Nicolao. Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing. In IEEE Conference on Automation Science and Engineering, CASE 2011, Trieste, Italy, Aug. 24-27, 2011. pages 244-249, IEEE, 2011. [doi]

Abstract

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