Robustify ML-Based Lithography Hotspot Detectors - researchr publication authors

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Jingyu Pan, Chen-Chia Chang, Zhiyao Xie, Jiang Hu, Yiran Chen 0001. Robustify ML-Based Lithography Hotspot Detectors. In Tulika Mitra, Evangeline Young, Jinjun Xiong, editors, Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2022, San Diego, California, USA, 30 October 2022 - 3 November 2022. ACM, 2022. [doi]

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