Application of polyimide to bending-mode microactuators with Ni/Fe and Fe/Pt magnet

C. T. Pan, P. J. Cheng, C. K. Yen, C. C. Hsieh. Application of polyimide to bending-mode microactuators with Ni/Fe and Fe/Pt magnet. Microelectronics Reliability, 46(8):1369-1381, 2006. [doi]

Abstract

Abstract is missing.