Hongqing Pan, Guangyu Hu, Pingguo Cao, Yubing Wang, YunJian Ge, Feng Shuang. A thin film pressure sensor with double sensitive units. In IEEE International Conference on Information and Automation, ICIA 2015, Lijiang, China, August 8-10, 2015. pages 2947-2948, IEEE, 2015. [doi]
Abstract is missing.