Electrostatic torsional micromirror: Its active control and applications in optical network

Ya-Jun Pan, Yuan Ma, Shariful Islam. Electrostatic torsional micromirror: Its active control and applications in optical network. In 2008 IEEE International Conference on Automation Science and Engineering, IEEE CASE 2008, Washington, DC, USA, August 23-26, 2008. pages 151-156, IEEE, 2008. [doi]

Abstract

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