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A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation

Chunrong Pan, Yan Qiao, Naiqi Wu, MengChu Zhou. A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 45(5):805-818, 2015. [doi]

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