Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review - researchr publication authors

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Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu. Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review. In 12th IEEE International Conference on Networking, Sensing and Control, ICNSC 2015, Taipei, Taiwan, April 9-11, 2015. pages 271-276, IEEE, 2015. [doi]

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