Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu. Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review. In 12th IEEE International Conference on Networking, Sensing and Control, ICNSC 2015, Taipei, Taiwan, April 9-11, 2015. pages 271-276, IEEE, 2015. [doi]
@inproceedings{PanZQW15,
title = {Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review},
author = {Chunrong Pan and MengChu Zhou and Yan Qiao and Naiqi Wu},
year = {2015},
doi = {10.1109/ICNSC.2015.7116047},
url = {http://dx.doi.org/10.1109/ICNSC.2015.7116047},
researchr = {https://researchr.org/publication/PanZQW15},
cites = {0},
citedby = {0},
pages = {271-276},
booktitle = {12th IEEE International Conference on Networking, Sensing and Control, ICNSC 2015, Taipei, Taiwan, April 9-11, 2015},
publisher = {IEEE},
isbn = {978-1-4799-8069-7},
}