Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

Milind S. Pandit, Chun Zhao, Guillermo Sobreviela, Arif Mustafazade, Ashwin A. Seshia. Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

Abstract

Abstract is missing.