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Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy

P. Pungboon Pansila, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose. Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy. IEICE Transactions, 98-C(5):382-389, 2015. [doi]

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P. Pungboon Pansila

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Kensaku Kanomata

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Bashir Ahmmad

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Shigeru Kubota

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Fumihiko Hirose

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