P. Pungboon Pansila, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose. Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy. IEICE Transactions, 98-C(5):382-389, 2015. [doi]
@article{PansilaKAKH15,
title = {Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy},
author = {P. Pungboon Pansila and Kensaku Kanomata and Bashir Ahmmad and Shigeru Kubota and Fumihiko Hirose},
year = {2015},
url = {http://search.ieice.org/bin/summary.php?id=e98-c_5_382},
researchr = {https://researchr.org/publication/PansilaKAKH15},
cites = {0},
citedby = {0},
journal = {IEICE Transactions},
volume = {98-C},
number = {5},
pages = {382-389},
}