Falk Stefan Pappert, Tao Zhang, Oliver Rose, Fabian Suhrke, Jonas Mager, Thomas Frey. Impact of time bound constraints and batching on metallization in an opto-semiconductor fab. In Winter Simulation Conference, WSC 2016, Washington, DC, USA, December 11-14, 2016. pages 2947-2957, IEEE, 2016. [doi]
Abstract is missing.