Sung-Hoon Park, Tai-Wook Kim, Jeong Ho Lee, Heui-Jae Pahk. Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography. J. Electronic Imaging, 23(1):13001, 2014. [doi]
@article{ParkKLP14,
title = {Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography},
author = {Sung-Hoon Park and Tai-Wook Kim and Jeong Ho Lee and Heui-Jae Pahk},
year = {2014},
doi = {10.1117/1.JEI.23.1.013001},
url = {http://dx.doi.org/10.1117/1.JEI.23.1.013001},
researchr = {https://researchr.org/publication/ParkKLP14},
cites = {0},
citedby = {0},
journal = {J. Electronic Imaging},
volume = {23},
number = {1},
pages = {13001},
}