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Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography

Sung-Hoon Park, Tai-Wook Kim, Jeong Ho Lee, Heui-Jae Pahk. Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography. J. Electronic Imaging, 23(1):13001, 2014. [doi]

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