Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors

Hee Pyung Park, Sang-Woo Kim, Joong-Won Shin, Won-Ju Cho, Jong-Tae Park. Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors. Microelectronics Reliability, 88:873-877, 2018. [doi]

@article{ParkKSCP18,
  title = {Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors},
  author = {Hee Pyung Park and Sang-Woo Kim and Joong-Won Shin and Won-Ju Cho and Jong-Tae Park},
  year = {2018},
  doi = {10.1016/j.microrel.2018.06.052},
  url = {https://doi.org/10.1016/j.microrel.2018.06.052},
  researchr = {https://researchr.org/publication/ParkKSCP18},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {88},
  pages = {873-877},
}