Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors

Hee Pyung Park, Sang-Woo Kim, Joong-Won Shin, Won-Ju Cho, Jong-Tae Park. Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors. Microelectronics Reliability, 88:873-877, 2018. [doi]

Abstract

Abstract is missing.