Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment

Kyungsu Park, James R. Morrison. Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment. In IEEE Conference on Automation Science and Engineering, CASE 2010, Toronto, ON, Canada, 21-24 August, 2010. pages 45-50, IEEE, 2010. [doi]

Abstract

Abstract is missing.