Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films - researchr publication authors

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Gwang Hoon Park, Yoh-Han Pao, Kurt G. Eyink, Steven R. LeClair, M. S. Soclof. Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films. In Alfons Crespo, editor, Postprint Volume from the IFAC Symposium on Artificial Intelligence in Real-Time Control, AIRTC 1994, Valencia, Spain, October 3-5, 1994. pages 123-128, Elsevier, 1994. [doi]

This author has not been identified. Look up 'Gwang Hoon Park' in GoogleThis author has not been identified. Look up 'Yoh-Han Pao' in GoogleThis author has not been identified. Look up 'Kurt G. Eyink' in GoogleThis author has not been identified. Look up 'Steven R. LeClair' in GoogleThis author has not been identified. Look up 'M. S. Soclof' in Google

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